Deposition
AJA 8–Target UHV MRAM Magnetron Sputtering System
Ultra-high vacuum magnetron deposition system optimized for MRAM and spintronic thin-film stacks.
Deposition
ULVAC ENTRON-EX Sputtering System
High-throughput semiconductor deposition for metal interconnects, patterning masks, electrodes, and functional films.
Deposition
Atomic Layer Deposition Tool
Atomic-scale precision deposition for ultra-thin dielectrics, passivation, and barrier layers with total conformality.
Lithography
Raith e-Line Electron Beam Lithography
High-resolution pattern generator for ultra-fine nanoscale device patterning and prototype fabrication.
Lithography
Raith Voyager Electron Beam Lithography
High-speed, scalable e-beam lithography engineered for spintronic devices, photonics, and sub-10 nm structures.
Lithography
Suss Microtec MJB4 Mask Aligner
Precision optical alignment lithography tool for micro-scale contact printing and multi-level mask patterning.
Etching
AJA Ion Milling System with Hiden SIMS Detector
Argon ion beam milling equipped with inline secondary ion mass spectrometry for endpoint detection in magnetic stacks.
Etch & CVD
Plasma Therm 200 mm Dual Chamber ICP-RIE and PECVD System
Dual-chamber tool supporting Inductively Coupled Plasma Reactive Ion Etching (ICP-RIE) and Plasma-Enhanced Chemical Vapor Deposition (PECVD).
RF Probing
Cascade Microtech 40GHz RF Probe Station
High-frequency microwave probe station combined with magnetic field application setups for high-speed device dynamics.
Electrical
Keithley 4200A-SCS Semiconductor Parameter Analyzer
Comprehensive I-V, C-V, and ultra-fast pulsed characterization analyzer for memristive, spintronic, and neuromorphic devices.
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